Research リサーチ

現在進行中のテーマ (Current projects)

実験装置 (Equipment)

4He cryostat with electromagnet (1.3 < T < 300 K)
3He insert (0.3 < T < 300 K)
3He/4He dilution refrigerator (0.02 < T < 10 K)
Cryogen free cryostat (1.6 < T < 300 K)
Glovebox system
Electron beam evaporators & Ar milling system
DC and RF sputtering systems
Plasma etching system (O2 & CF4)
Atomic force, metallographic and optical microscopes
Mask aligner, spin coaters, scribers
Furnace
Wire bonder